for the supports,Beyond
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Main Products
Main Products/Ceramic products
Fine Ceramic Material

Various ceramic materials are available; Alumina, Zirconia, Silicon nitride, Silicon carbide, Porefree® etc.
Alumina Zirconia Silicon nitride Silicon carbide Porefree®
•Parts for semiconductor equipments
Wafer Table(Vacuum Chuck), Electrostatic Chuck, End Effector, Clamp Ring, various parts with anti-plasma property
•Large anti-abrasive parts for powder process equipment
•High sphericity ball(High purity alumina, Zirconia, etc.):check valve for pump
•Heat-resisting parts•Ultra precise parts•Large parts•Mechanical seal•etc.
Ceramics Property Sheet (PDF:100KB)
Ceramic products
Coating&Cleaning  technology
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