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Ultraprecise Vacuum Chuck

Dia.300mm wafer Laser interference measurement data
(Reference)
NTK Ceratec produces state-of-the-art precise wafer table with ultimate level of flatness and smoothness made of PoreFree Ceramics.
Wafer table is designed for each various type wafer and its smoothness is proved in mainstream 12" wafer.

Application
•Wafer tester
•Fixture for processing machine

Wafer Table(Vacuum Chuck) (PDF:213KB)
Ceramic products
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