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Electrostatic Chuck

NTK Ceratec's excellent material technology enables state-of-the-art Electrostatic Chuck (ESC) suited to each customer's demand. We offer ESCs used in plasma condition, electron beam condition, or low expansion applications from the R&D stage and beyond.

Application
•ESC with heater used for plasma application
•Non- magnetism ESC for electron beam application
•Ceramic coated ESC for large and special glass substrate
Cross section model of spray coat type ESC
Electrostatic Chuck (PDF:593KB)
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