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ZPF(Zero Expansion Stiffness Ceramics)

ZPF is revolutionary ceramics that has zero expansion characteristics same as Low-Expansion-Recrystallized glass with high stiffness like ceramic material.

Application
•Mirror for laser interference
•Electrostatic Chuck
•Parts of XY stage
ZPF
ZPF(Zero Expansion Stiffness Ceramics)(PDF:145KB)
Ceramic products
Coating&Cleaning  technology
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