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Ceramic coating

Our joint project between a leading spray coating equipment manufacturer, Aero Plasma, and Nihon Ceratec established the most advanced ceramic coating technology. This has an infinite number of possibilities for increasing density while providing resistance to voltage and high energy plasmas.
High Density Anti-Plasma Thermal Spray Coating
Application
•Various semiconductor chamber materials
•Electrostatic Chuck
Ceramic coating (PDF:174KB)
Ceramic products
Coating&Cleaning  technology
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