for the supports,Beyond
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Main Products
Main Products/Ceramic products
Fine Ceramic Material

Various ceramic materials are available; Alumina, Zirconia, Silicon nitride, Silicon carbide, PorefreeŽ etc.
Alumina Zirconia Silicon nitride Silicon carbide PorefreeŽ
?Parts for semiconductor equipments
Wafer Table(Vacuum Chuck), Electrostatic Chuck, End Effector, Clamp Ring, various parts with anti-plasma property
?Large anti-abrasive parts for powder process equipment
?High sphericity ball(High purity alumina, Zirconia, etc.):check valve for pump
?Heat-resisting parts?Ultra precise parts?Large parts?Mechanical seal?etc.
Ceramics Property Sheet (PDF:100KB)
Ceramic products
Coating&Cleaning technology
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