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| Various ceramic materials are available; Alumina, Zirconia, Silicon nitride, Silicon carbide, Porefree® etc. |
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| Alumina |
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Zirconia |
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Silicon nitride |
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Silicon carbide |
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Porefree® |
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Application
?Parts for semiconductor equipments
Wafer Table(Vacuum Chuck), Electrostatic Chuck, End Effector, Clamp Ring, various parts with anti-plasma property
?Large anti-abrasive parts for powder process equipment
?High sphericity ball(High purity alumina, Zirconia, etc.):check valve for pump
?Heat-resisting parts?Ultra precise parts?Large parts?Mechanical seal?etc. |
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| Ceramics Property Sheet (PDF:100KB) |
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