for the supports,Beyond
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Porous Chuck

NTK Ceratec's Porous Chuck is best in class because it maintains the highest degree of flatness and smoothness. Our special manufacturing method provides the customer with reliable wafers large enough to fit their requirements.

?Grinding Si wafers
?Glass substrate carrier
?Fixing film sheet or metal substrate
Structure of Porous Chuck (Example of use)
Porous Chuck(PDF:169KB)
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