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?Piezoceramic positioner
Laminated multilayer piezoceramic element is used for this application in direction of stacking.
High reliability due to metal can structure is suitable for ultra-precise positioning device and mass flow controller application. We also supply its driver.
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| ?Piezo Driver (Power supply designed for the above positioner) |
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| ?NAPS (Controller for ultra-precise positioning application) |
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| ?Bimorph actuator |
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| ?Precise Z-axis positioning system |
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Nihon Ceratec developed new Z-axis positioning system that has high reliability and resolution better than 5 nm. This can be used in various applications, for example, microscope with auto focus function.
Application
?Auto focus for microscope
?Precise test system for semiconductor
?Precise test system for optical storage |
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